Modeling a Surface Micromachined Accelerometer
Bridget Cunningham December 23, 2014
Surface micromachining is a process used to manufacture MEMS devices, which includes accelerometers. In this blog post, we model the electric field and forces within an accelerometer as well as highlight a new geometry feature available in COMSOL Multiphysics version 5.0.
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Amelia Halliday June 16, 2014
If you are searching for a tutorial on how to model a miniaturized 3D electromechanics problem, then look no further. We have just published an updated version of our video tutorial on how to simulate a capacitive pressure sensor. COMSOL Multiphysics version 4.4 and the MEMS Module are used to simulate the electrostatic, structural, and thermal physics that occur.
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Lexi Carver January 7, 2014
An RF MEMS switch is an electromechanical component found in RF systems. It usually consists of a micromechanical bridge or cantilever, a substrate, and an electrode or dielectric layer. These devices can switch at RF frequencies and tend to have high isolation, i.e. power loss when the switch turns off; low insertion loss (loss of signal power when the switch is on), and extremely low (almost zero!) power consumption. Let’s take a look at how you can use COMSOL Multiphysics […]
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Mads Herring Jensen January 2, 2014
I recently had the pleasure of preparing a small contribution to the 166th Meeting of the Acoustical Society of America (Fall 2013) together with Wade Conklin and Jordan Schultz from Knowles Electronics. Wade presented our paper entitled “Characterization of a microelectromechanical microphone using the finite element method”. The work consisted of implementing a virtual prototype of a Knowles MEMS microphone (the SPU0409LE5H microphone, see picture below) using COMSOL Multiphysics.
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Supratik Datta September 25, 2013
If you are using a cell phone, GPS, Bluetooth, or WiFi, chances are that they all have BAW resonators working inside them. All wireless electronic equipment use RF filters to help narrow down the frequency range they should operate within. With thousands of devices working within closely-packed radio frequencies, it is becoming increasingly important to design filters that would be able to reduce interference from unwanted frequencies, boost the signal-to-noise ratio, and lower insertion loss. Doing so may lead to […]
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Walter Frei September 10, 2013
A question we get asked all of the time is: “Which of the COMSOL products should be used for modeling a particular electromagnetic device or application?” There are currently six modules labeled as “Electrical” in the product suite; the AC/DC Module, RF Module, Wave Optics Module, MEMS Module, Plasma Module, and Semiconductor Module. The first four address applications purely governed by various forms of Maxwell’s equations, while the Plasma Module addresses the coupling of electromagnetic fields to plasma transport and […]
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Fanny Griesmer December 12, 2012
A while back, I wrote about permanent magnet generators and how they generate electricity upon being set in motion. When browsing the papers from our conference in Bangalore, one on the topic of ultrasonic micro motors caught my eye. These motors are electromechanical in nature and instead initiate motion with the application of an electric voltage. Furthermore, these motors are miniaturized to fit a micro-scale environment.
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